2017 г.

Structural properties of the formation of zinc-containing nanoparticles obtained by ion implantation in Si (001) and subsequent thermal annealing

Автор(ы): Мигунов Д.М., Eidelman K.B., Tabachkova N.Yu., Shcherbachev K.D., Parkhomenko Y.N. Privesentsev Vl.V.
Опубликовано: Modern Electronic Materials – 2017. – Vol. 3 – P. 104–109
DOI: https://doi.org/10 .1016/j.moem.20 17.10.003
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