2018 г.

Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes

Автор(ы): Дюжев Н. А., Салащенко Н.Н., Чхало Н.И.
Опубликовано: Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques. – 2018. – Т. 12, № 5. – С. 944-952
DOI: 10.1134/S1027451018050324
Статус: Scopus, Web of Science