Peculiarities of the Influence of Nanostructuring of [SiO2/Si3N4]n Multilayer Membranes on Its Thermal and Mechanical Properties
Автор(ы): Дюжев Н. А., Глаголев П.Ю., Демин Г.Д., Оводов А.И.
Опубликовано: 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus Россия Статус: Scopus