Research of the Possibility to Obtain Structures with Nanometer Layer Thicknesses and Sharp-Cut Interfaces between them Using Ion-Beam and Reactive Ion-Beam Deposition Processes
Автор(ы): Дедкова А.А., Киреев В.Ю., Трифонов А.Ю., А. С. Мысливец, П. А. Розель
Опубликовано: Nanotechnologies in Russia 2019. – V. 14, Nos. 5-6. – P. 234-239. DOI: 10.1134/S1995078019030042
Статус: Scopus, Web of Science, Ядро Web of Science