2019 г.

Maskless nanolithography on the basis of microfocus x-ray tubes: conversion of electron energy into the BeKα line

Автор(ы): Дюжев Н. А., Махиборода М.А., Демин Г.Д., Чхало Н.И., Ломатин А.Я., Пестов А.Е.
Опубликовано: Proceedings of SPIE - The International Society for Optical Engineering Сер. "International Conference on Micro- and Nano-Electronics 2018". – 2019. – Р. 110221M
DOI: 10.1117/12.2522105
Статус: Scopus, Web of Science, РИНЦ