2019 г.

The Effect of Ion Beam Etching on Mechanical Strength Multilayer Aluminum Membranes.

Автор(ы): Борисова А.В., Гусев Е.Э., Дедкова А.А., Киреев В.Ю., Сальников А.А.
Опубликовано: Proceedings of the 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2019. – 2019. – С. 1990-1994
DOI: 10.1109/EIConRus.2019.8657243
Статус: Scopus, Web of Science, РИНЦ